具有自检自标定功能的高负载电容式金属微加速度计的研究

提出一种由圆形板和大量扇形梁构成活动部件的新型高负载电容式微加速度计。通过将固定电极分为检测电极与驱动电极，可实现自检自标定功能。该微加速度计以金属为核心部件材料，并采用UV-LIGA微工艺进行加工。虽然活动部件因全柔性而具有复杂变形、器件内存在复杂机电耦合，但该传感器所建立的计算模型具有精确、快速的特点。采用AD77...

Studies on Self-testable/Self-calibratable Capacitive Microaccelerometer with Metal Structure and High Load Capacity

A novel microaccelerometer which can undergo high load is developed.In this microaccelerometer,the movable structure is composed of a circular plate and numbers of sector beams.By dividing the fixed electrode into two test electrodes and a driving electrode,the self-test and self-calibration functions are realizable.Key components of the microaccelerometer are made of metal,and the microaccelerometer is fabricated by UV-LIGA.Though there exists complex deformation on the fully compliant beam-plate structure and there exists complex electromechanical coupling in the microaccelerometer,an accurate and time-saving model is developed.A test on this device is processed based on AD7747,and it verifies the realizabilities of self-calibration of structure/material parameters and self-test of faults.