A deceleration system at the Heidelberg EBIT providing very slow highly charged ions for surface nanostructuring

Recently, it has been demonstrated that each single-impact of a slow (typically 1-2 keV/u) highly charged ion (HCI) creates truly topographic and non-erasable nanostructures on CaF₂ surfaces. To further explore the possibility of nanostructuring various surfaces, using mainly the potential energy stored in such HCIs, projectiles with kinetic energies as low as possible are required. For this purpose a new apparatus, capable of focusing and decelerating an incoming ion beam onto a solid or gaseous target, has been installed at the Heidelberg electron beam ion trap (EBIT). An X-ray detector and a position-sensitive particle detector are utilized to analyze the beam and collision products. First experiments have already succeeded in lowering the kinetic energy of HCIs from 10 keV/q, down to ∼30 eV/q, and in focusing the decelerated beam to spot sizes of less than 1 mm², while maintaining the kinetic energy spread below ∼20 eV/q.