Polycrystalline silicon-carbide surface-micromachined vertical resonators-part I: growth study and device fabrication |
| |
Authors: | Wiser R.F. Juyong Chung Mehregany M. Zorman C.A. |
| |
Affiliation: | Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA; |
| |
Abstract: | |
| |
Keywords: | |
|
|