| 激光驱动气相反应制备纳米级Si3N4超细粉末 |
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| 引用本文： | 张其士,肖涤凡.激光驱动气相反应制备纳米级Si3N4超细粉末[J].现代技术陶瓷,1994,15(3):19-22. |
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| 作者姓名： | 张其士 肖涤凡 |
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| 作者单位： | 南京化工学院材料系
(张其土)，哈尔滨工业大学(肖涤凡) |
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| 摘 要： | 本文利用CW—CO_2激光驱动气相化学反应的方法,以SiN_4和NH_3作为原料气体合成了纳米级Si_3N_4超细粉末。本工艺过程的产率达95％。由化学分析表明产物的纯度为含Si_3N_493.75wt％,杂质主要是氧,其含量为1.86wt％,另外还存在总含量为500ppm的Ca、Mg等杂质。由X射线衍射和透射电子显微镜等的分析表明,产物的颗粒近似于球形、不团聚,粒径分布范围为10um～30nm,平均粒径为17um,而其结晶性状呈现非晶态结构。
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| 关 键 词： | 激光 氮化硅陶瓷 超细粉 气相反应 |
Synthesis of Nano-Size Si_3N_4 Powders by Laser Driven Gas Phase Reactions |
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| Zhang Qitu Xiao Difan.Synthesis of Nano-Size Si_3N_4 Powders by Laser Driven Gas Phase Reactions[J].Advanced Ceramics,1994,15(3):19-22. |
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| Authors: | Zhang Qitu Xiao Difan |
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| Affiliation: | Zhang Qitu Xiao Difan
(Nanjing Institute of Chemical Technology) (Harbin Industrial University) |
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| Abstract: | Nano-Size Si3N4 ultrafine powders have been synthesized through CW-CO2 laser-driven vapor phase reactions in the SiH4-NH3 gas system. The final productivity of this process is 95%. Chemical analysis revealed that purity of the product is 93. 75wt% Si3N4,including 1. 86wt% Oxygen as the main impurity. And trace impurities,such as Ca,Mg and other metals,are only 500ppm. XRD and TEM analyses indicated that the powders are nearly spherical and nanogglomerated. The particle sizes range from 10nm to 30nm with an average of 17nm. The particles possess noncrystalline microstruc-ture. |
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| Keywords: | Laser Silicon-nitrider Powder Gas-phase Reaction |
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