| 半导体材料少子寿命测试仪的研制开发 |
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| 引用本文： | 万振华,崔容强,徐林,陈凤翔.半导体材料少子寿命测试仪的研制开发[J].中国测试技术,2005,31(2):118-120,126. |
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| 作者姓名： | 万振华 崔容强 徐林 陈凤翔 |
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| 作者单位： | 上海交通大学物理系太阳能研究所,上海,200240 |
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| 摘 要： | 少数载流子寿命(简称少子寿命)是半导体材料的一项重要参数，它对半导体器件的性能、太阳能电池的效率都有重要的影响。我们采用微波反射光电导衰减法研制了一台半导体材料少子寿命测试仪，本文将对测试仪的实验装置、测试原理及程序计算进行了较详细的介绍，并与国外同类产品的测试进行比较，结果表明本测试仪测试结果准确、重复性高，适合少子寿命的实验室研究和工业在线测试。
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| 关 键 词： | 少子寿命 微波反射光电导 半导体材料 |
| 文章编号： | 1672-4984(2005)02-0118-03 |
R&D of minority carrier lifetime tester for semiconductor |
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| WAN Zhen-hua,CUI Rong-qiang,XU Lin,CHEN Feng-xiang.R&D of minority carrier lifetime tester for semiconductor[J].China Measurement Technology,2005,31(2):118-120,126. |
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| Authors: | WAN Zhen-hua CUI Rong-qiang XU Lin CHEN Feng-xiang |
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| Abstract: | The minority carrier lifetime is one of the most important parameters charactering semiconductor material.The knowledge of minority carrier lifetime has great influence on the material performance and the efficiency of solar cells.In this paper, we introduced JD-07minority carrier lifetime tester, which based on the microwave reflected photo conductance.The detailed measurement principle, the experimental setup and program used in the data process were presented.The measurement results were compared with those measured by foreign product WT-2000.Through comparison we found the measurement results of JD-07 were also accurate and stable, which is suitable for both the lab research and online monitoring. |
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| Keywords: | Minority carrier lifetime Photoconductivity decay by microwave reflectance Semiconductor material |
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