CoFe/TiZr多层膜材料界面结构与性能的极化中子反射研究

利用极化中子反射技术较系统地研究了CoFe/TiZr复合多层膜材料界面结构，结果表明.1)从多层膜超镜传输特性角度考虑，等厚对层不如非等厚对层膜结构好.2)等厚对层的最佳退火温度约250℃，非等厚对层退火温度低于250℃影响不明显，等厚和非等厚对层经350℃退火后膜层变化严重.3)从布拉格峰位变化看，随着退火温度的升高，等厚对层膜的厚度先变小后变大；非等厚对层与之相反. 关键词： CoFe/TiZr多层膜 退火影响 膜层结构 极化中子反射

Investigation of interfacial structure and property of CoFe/TiZr multilayers by polarized neutron reflectometry

Polarized neutron reflectivity has been measured for the CoFe/TiZr alloy multilayers. The results show that: (a) The reflectivity behavior of the sample with un-equal-thickness bilayer (type B) is better than that of the sample with equal-thickness bilayer (type A). The former performs better in producing neutron guide. (b) The best annealing temperature is about 250℃ for the sample of type A, however, the structures of both type A and type B samples change apparently after 350℃ annealing. (c) Different from the type B sample, the first Bragg peak position for the type A sample moves along Q axis， indicating that the period of the multilayer varies in a way of increase-decrease-increase with the increase of annealing temperature.