| 基于RFPECVD方法不锈钢上沉积类金刚石薄膜的机械与摩擦特性 |
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| 引用本文： | 蔺增,巴德纯,王志,闻立时.基于RFPECVD方法不锈钢上沉积类金刚石薄膜的机械与摩擦特性[J].真空科学与技术学报,2004,24(1):77-80. |
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| 作者姓名： | 蔺增 巴德纯 王志 闻立时 |
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| 作者单位： | 1. 东北大学真空与流体工程研究中心,沈阳,110004
2. 中国科学院金属研究所,沈阳,110016 |
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| 摘 要： | 讨论用射频等离子体增强化学气相沉积(RFPECVD)工艺,在室温下实现在1Cr18Ni9Ti不锈钢基底上镀类金刚石(DLC)膜.为提高DLC膜的结合力,首先在不锈钢基底上沉积Ti/TiN/TiC功能梯度膜.借助所设计的界面过渡层,成功地在不锈钢基底上沉积了一定厚度的DLC膜.通过优化沉积参数,所沉积的DLC膜在与100Cr6钢球对磨时摩擦系数低于0.020.在摩擦过程中DLC膜的磨损机制借助SEM、Raman分析进行了研究.
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| 关 键 词： | 类金刚石薄膜 不锈钢 射频等离子体增强化学气相沉积 摩擦 磨损 |
| 文章编号： | 1672-7126(2004)01-0077-04 |
| 修稿时间： | 2003年7月25日 |
Mechanical and Tribological Properties of Diamond-like Carbon Films on Stainless Steel Grown by RF Plasma Enhanced Chemical Vapor Deposition |
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| Lin Zeng ,Ba Dechun ,Wang Zhi and Wen Lishi .Vacuum and Fluid Engineering Research Center,Northeastern University,ShenYang,China.Mechanical and Tribological Properties of Diamond-like Carbon Films on Stainless Steel Grown by RF Plasma Enhanced Chemical Vapor Deposition[J].JOurnal of Vacuum Science and Technology,2004,24(1):77-80. |
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| Authors: | Lin Zeng Ba Dechun Wang Zhi and Wen Lishi Vacuum and Fluid Engineering Research Center Northeastern University ShenYang China |
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| Affiliation: | Lin Zeng 1,Ba Dechun 1*,Wang Zhi 1 and Wen Lishi 2 1.Vacuum and Fluid Engineering Research Center,Northeastern University,ShenYang,110004,China, 2 Institute of Metal Research,the Chinese Academy of Science,Shenyang,110016,China |
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| Abstract: | Diamond like carbon (DLC) film has been successfully grown at room temperature on 1Crl8Ni9Ti stainless steel substrate by radio frequency plasma enhanced chemical vapor deposition (RFPECVD) in a C 4H 10 /Ar plasma.To improve the interfacial adhesion,functional gradient Ti/TiN/TiC buffer layers were pre deposited.In the wear test against 100Cr6 steel balls,the friction coefficients of the DLC films can be lower than 0.020.Surface damages of DLC film caused by friction were examined with scanning electron microscopy (SEM) and Raman spectroscopy. |
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| Keywords: | Diamond like carbon (DLC) film Stainless steel RFPECVD Friction Wear |
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