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谐振式传感器振动特性测试系统
引用本文:蔡晨光,樊尚春.谐振式传感器振动特性测试系统[J].微纳电子技术,2007,44(7):174-175,191.
作者姓名:蔡晨光  樊尚春
作者单位:北京航空航天大学,仪器科学与光电工程学院,北京,100083
摘    要:采用激光测振仪测量振动元件表面的幅值。用于检测谐振式传感器振型的测试系统,主要由计算机、激励信号源、激光测振仪、数据采集卡组成。计算机控制激励信号源产生与被测谐振式传感器一个模态所对应的固有频率相一致的激励信号,激励被测谐振式传感器,使之处于受迫振动状态,计算机通过数据采集卡控制激光测振仪对被测谐振式传感器的振动元件进行空间扫描,测出被测谐振式传感器振动元件表面各点的振动信号,通过数据采集卡将激励信号和激光测振仪测出的振动信号采集到计算机中,计算出振动信号与激励信号的幅度和相位差,解算并绘制出被测谐振式传感器该模态对应的振型。

关 键 词:谐振式传感器  谐振频率  模态  振型
文章编号:1671-4776(2007)07/08-0174-02
修稿时间:2007-04-06

Vibration Characteristics Measure System for Resonant Sensors
CAI Chen-guang,FAN Shang-chun.Vibration Characteristics Measure System for Resonant Sensors[J].Micronanoelectronic Technology,2007,44(7):174-175,191.
Authors:CAI Chen-guang  FAN Shang-chun
Abstract:The laser vibrometer was used to meaure the vibrating signal. The vibration characteristics measure system was made up of the computer, signal generator, laser vibrometer and data acquisition card. The signal generator was controlled by the computer to provide the exciting signal, which frequency was the same as the nature frequency of the sensor. The sensor was excited to vibrate with its nature frequency. The laser vibrometer was controlled to scan the vibrating structure surface, and the vibration magnitudes were measured and sent to the computer by the data acquisition card. The vibration shape was gained by calculating and analysing the vibration signals and the exciting signals.
Keywords:resonant microsensor  resonant frequency  mode  vibration shape
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