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Characteristics of High In-Content InGaN Alloys Grown by MOCVD
引用本文:朱学亮 郭丽伟 于乃森 彭铭曾 颜建锋 葛炳辉 贾海强 陈弘 周均铭. Characteristics of High In-Content InGaN Alloys Grown by MOCVD[J]. 中国物理快报, 2006, 23(12): 3369-3372
作者姓名:朱学亮 郭丽伟 于乃森 彭铭曾 颜建锋 葛炳辉 贾海强 陈弘 周均铭
作者单位:Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy ot Sciences. Beijing 100080
基金项目:Supported by the Knowledge Innovation Project of Chinese Academy China under Grant Nos 10474126 and 10574148, the National Key Basic Grant No 2002CB311900.
摘    要:InN and In0.46 Ca0.54N films are grown on sapphire with a CaN buffer by metalorganic chemical vapour deposition (MOCVD). Both high resolution x-ray diffraction and high resolution transmission electron microscopy results reveal that these films have a hexagonal structure of single crystal. The thin InN film has a high mobility of 4 75 cm^2V^-1s^-1 and that oflno.46 Gao.54N is 163 cm^2 V^-1s^-1. Room-temperat ure photoluminescence measurement of the InN film shows a peak at 0.72eV, confirming that a high quality InN film is fabricated for applications to full spectrum solar cells.

关 键 词:InN膜 In0.46 Ca0.54N膜 MOCVD法 晶体生长 铟含量 太阳电池
收稿时间:2006-06-09
修稿时间:2006-06-09

Characteristics of High In-Content InGaN Alloys Grown by MOCVD
ZHU Xue-Liang,GUO Li-Wei,YU Nai-Sen,PENG Ming-Zeng,YAN Jian-Feng,GE Bing-Hui,JIA Hai-Qiang,CHEN Hong,ZHOU Jun-Ming. Characteristics of High In-Content InGaN Alloys Grown by MOCVD[J]. Chinese Physics Letters, 2006, 23(12): 3369-3372
Authors:ZHU Xue-Liang  GUO Li-Wei  YU Nai-Sen  PENG Ming-Zeng  YAN Jian-Feng  GE Bing-Hui  JIA Hai-Qiang  CHEN Hong  ZHOU Jun-Ming
Affiliation:Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences Beijing 100080
Abstract:InN and In0.46Ga0.54N films are grown on sapphire with a GaN buffer by metalorganic chemical vapour deposition (MOCVD). Both high resolution x-ray diffraction and high resolution transmission electron microscopy results reveal that these films have a hexagonal structure of single crystal. The thin InN film has a high mobility of 475 cm2V-1s-1 and that of In0.46Ga0.54 is 163 cm2V-1s-1;. Room-temperature photoluminescence measurement of the InN film shows a peak at 0.72 eV, confirming that a high quality InN film is fabricated for applications to full spectrum solar cells.
Keywords:81.15.Gh  61.10.Nz  68.37.Ps
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