|
|||||
|
|
Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films |
|
| Authors: | Jiaqi ZHU Jiecai HAN Songhe MENG Qiang LI Manlin TAN |
| Abstract: | The microstructure and properties of tetrahedral amorphous carbon (ta-C) films deposited by the filtered cathodic vacuum arc technology has been investigated by visible Raman spectroscopy, AFM and Nano-indentor. The Raman spectra have been fitted with a s |
| Keywords: | Tetrahedral amorphous carbon |
| 本文献已被 万方数据 等数据库收录！ | |
