同位素择尤溅射角分布研究

本文从理论和实验两个方面探讨了同位素溅射角分布问题。从实验上得到的同位素溅射角分布曲线表明,在垂直靶面方向轻同位素择尤溅射,而在倾斜方向,则重同位素择尤溅射。在理论上考虑了原子级联碰撞过程中的能量和动量传输的不对称性,给出了一个与实验结果相符的同位素溅射角分布表达式。 关键词：

STUDIES ON THE ANGULAR DISTRIBUTION OF ISOTOPIC PREFERENTIAL SPUTTERING

The angular distribution of isotopic sputtering was studied theoretically and experimentally in this paper. A careful experiment was carried out, and a theoretical model was established. The result was that the light isotopes are preferential ejected "normally" and the heavy ones "obliquely". The reason was considered to oe the energy and momentum asymmetry between light and heavy isotopes in the collision cascades. A simple formula of the angular distribution of isotopic sputtering which fits the experimental result is given in this paper.