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基于MEMS压力传感器的微小型空速计
引用本文:王立代,熊沈蜀,周兆英. 基于MEMS压力传感器的微小型空速计[J]. 清华大学学报(自然科学版), 2005, 45(8): 1066-1068
作者姓名:王立代  熊沈蜀  周兆英
作者单位:清华大学,精密仪器与机械学系,北京,100084;清华大学,精密仪器与机械学系,北京,100084;清华大学,精密仪器与机械学系,北京,100084
摘    要:针对微型飞行器体积小、质量轻、能量和带载荷能力有限的特点,设计了微型空速计,包括微小型皮托管和基于微机电系统(MEMS)微差压传感器的低速测量电路,通过机载计算机测量电压信号并计算空速值。该空速计量程为3~26m/s,质量为4.3g,精度±1m/s,已经通过国家气象局计量站进行的测试。目前已成功应用在翼展小于400mm微型飞行器的空速测量上。

关 键 词:空速计  空速管  微型飞行器  微机电系统(MEMS)
文章编号:1000-0054(2005)08-1066-03
修稿时间:2004-09-06

Miniature airspeed meter based on MEMS pressure sensor
WANG Lidai,XIONG Shenshu,Zhou Zhaoying. Miniature airspeed meter based on MEMS pressure sensor[J]. Journal of Tsinghua University(Science and Technology), 2005, 45(8): 1066-1068
Authors:WANG Lidai  XIONG Shenshu  Zhou Zhaoying
Abstract:Micro airspeed meters were developed for Micro Aerial Vehicles that are small, light, and low power. The micro airspeed meter includes a micro pitot tube and a low-speed-measuring circuit based on a micro electromechanical systems (MEMS) differential pressure meter. An integral computer is used to measure the voltage from the pressure meter and calculate the airspeed. The measurement range is (326 m/s,) the mass is (4.3 g) and the precision is 1 m/s. The micro airspeed meter has been successfully used on unmanned aerial vehicles with wingspans less than 400 mm.
Keywords:airspeed meter  Pitot tube  micro aerial vehicle  micro electromechanical systems (MEMS)  
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