| 钙钛矿型铁电薄膜的溶胶-凝胶法制备 |
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| 引用本文： | 王歆,庄志强,周海牛.钙钛矿型铁电薄膜的溶胶-凝胶法制备[J].压电与声光,2002,24(1):57-60. |
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| 作者姓名： | 王歆 庄志强 周海牛 |
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| 作者单位： | 华南理工大学,材料学院,广州,510640 |
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| 基金项目： | 广东省自然科学基金资助项目 (990 616) |
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| 摘 要： | 介绍了溶胶－凝胶薄膜制备法，研究了浸涂法和旋涂法对薄膜质量的影响因素和控制理论，阐述薄膜干燥法与裂纹形成机理，基片因素对晶体结构的影响等问题。讨论溶胶－凝胶法制膜过程中，铁电薄膜全钙钛矿相的形成和晶粒的定向生长。
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| 关 键 词： | 溶胶－凝胶制膜技术 铁电体 薄膜 裂纹 钙钛矿相 定向生长 |
| 文章编号： | 1004-2474(2002)01-0057-04 |
| 修稿时间： | 2001年3月12日 |
Sol-Gel Method for Preparation of Perovskite-type Ferroelectric Thin Films |
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| WANG Xin,ZHUANG Zhi qiang,ZHOU Hai liu.Sol-Gel Method for Preparation of Perovskite-type Ferroelectric Thin Films[J].Piezoelectrics & Acoustooptics,2002,24(1):57-60. |
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| Authors: | WANG Xin ZHUANG Zhi qiang ZHOU Hai liu |
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| Abstract: | The preparation technologies of thin films by Sol Gel methods were described in this paper.The influences of the dipping and spin coating processing paraneters on the properties of the thin films were discussed theoretically.The formation and development of cracks during dying,the effect of substrate properties on the microstructure of the thin films,and the formation of highly oriented perovskite type ferroelectric thin films were also studied in this paper in detail. |
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| Keywords: | Sol Gel method for films ferroelectric thin film crack perovskite highly oriented |
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