Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives |
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Authors: | Jing Yang Luo Jianbin Yang Wenyan Ju Guoxian |
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Affiliation: | State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, PR China. jingy@post.pim.tsinghua.edu.cn |
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Abstract: | A new U-type micro-actuator for precisely positioning a magnetic head in high-density hard disk drives was proposed and developed. The micro-actuator is composed of a U-type stainless steel substrate and two piezoelectric ceramic elements. Using a high-d31 piezoelectric coefficient PMN-PZT ceramic plate and adopting reactive ion etching process fabricate the piezoelectric elements. Reliability against temperature was investigated to ensure the practical application to the drive products. The U-type substrate attached to each side via piezoelectric elements also was simulated by the finite-element method and practically measured by a laser Doppler vibrometer in order to testify the driving mechanics of it. The micro-actuator coupled with two piezoelectric elements featured large displacement of 0.875 microm and high-resonance frequency over 22 kHz. The novel piezoelectric micro-actuators then possess a useful compromise performance to displacement, resonance frequency, and generative force. The results reveal that the new design concept provides a valuable alternative for multilayer piezoelectric micro-actuators. |
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