| CO2激光打孔的折衍混合f-θ 透镜设计 |
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| 引用本文： | 张云翠,卢振武,孙强.CO2激光打孔的折衍混合f-θ 透镜设计[J].红外与激光工程,2006,35(5):519-522. |
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| 作者姓名： | 张云翠 卢振武 孙强 |
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| 作者单位： | 1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林 长春 130033;中国科学院研究生院,北京 100039
2. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林 长春 130033 |
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| 摘 要： | 激光打孔广泛应用于印刷电路板处理等领域,在该技术中f-θ透镜起到扫描成像的重要作用。利用折衍混合系统设计了f-θ透镜，在满足性能要求的前提下，减少了透镜的个数，降低了系统成本。该系统采用像方远心光路，工作波长为9.25 μm，打孔直径50 μm，深度182 μm，扫描面积达70 mm×70 mm。
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| 关 键 词： | CO2激光器 激光打孔 f-θ透镜 折衍射透镜 非球面 |
| 文章编号： | 1007-2276(2006)05-0519-04 |
| 收稿时间： | 2005-12-20 |
| 修稿时间： | 2006-01-18 |
Design of hybrid diffractive-refractive f-θ lens for CO2 laser drilling |
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| ZHANG Yun-cui,LU Zhen-wu,SUN Qiang.Design of hybrid diffractive-refractive f-θ lens for CO2 laser drilling[J].Infrared and Laser Engineering,2006,35(5):519-522. |
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| Authors: | ZHANG Yun-cui LU Zhen-wu SUN Qiang |
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| Affiliation: | 1.Changchun Institute of Optics, Fine Mechanics and Physics，Changchun 130033，China 2.Graduate University of the Chinese Academy of Sciences,Beijing 100049,China |
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| Abstract: | Laser drilling technology is applied in a wide field such as printed circuit board processing, in which f-θ lens plays an important role as scanning and imaging element. In this paper, a f-θ lens with a diffractive/refractive hybrid system for CO2 laser drilling is designed to decrease the number of lens and reduce the cost of system. This system uses telecentricity light path,working wavelength is 9.25 μm , focal depth is 182 μm ,diameter of drilling holes is 50 μm and scanning area is 70 mm×70 mm. |
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| Keywords: | CO2 laser Laser drilling f-θ lens Diffractive-refractive lens Asperic surface |
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