| 一种新型键合工艺的理论和实验研究 |
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| 引用本文： | 杨道虹,徐晨,董典红,李兰,吴畯苗,张剑铭,阳启明,金文贤,邹德恕,沈光地. 一种新型键合工艺的理论和实验研究[J]. 北京工业大学学报, 2004, 30(4): 423-426 |
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| 作者姓名： | 杨道虹 徐晨 董典红 李兰 吴畯苗 张剑铭 阳启明 金文贤 邹德恕 沈光地 |
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| 作者单位： | 北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022;北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022;北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022;北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022;北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022;北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022;北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022;北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022;北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022;北京工业大学,电子信息与控制工程学院北京市光电子技术实验室,北京,100022 |
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| 摘 要： | 为了实现在较低超净环境下的硅／硅直接键合,提出了在乙醇的环境中进行硅／硅键合的方法,并建立了合理的物理模型,在常温、常压和低于10万级超净环境下,用普通的国产硅片进行了无水乙醇环境下的硅／硅直接键合实验.键合后进行了拉力强度测试和SEM观测,发现界面没有孔洞,说明键合质量达到了要求.拉力测试结果表明,其键合强度达到了10MPa,初步验证了该方法的可行性.
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| 关 键 词： | 微电子机械系统 硅/硅直接键合 乙醇 |
| 文章编号： | 0254-0037(2004)04-0423-04 |
| 修稿时间： | 2003-08-20 |
Theoretical and Experimental Research on a Novel Silicon Directly Bonding Technology |
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| YANG Dao-hong,XU Chen,DONG Dian-hong,LI Lan,WU Jun-miao,ZHANG Jian-ming,YANG Qi-ming,JIN Wen-xian,ZOU De-shu,SHEN Guang-diCollege of Electronic Information , Control Engineering,Beijing University of Technology,Beijing Optoelectronic Technology Laboratory,Beijing ,China. Theoretical and Experimental Research on a Novel Silicon Directly Bonding Technology[J]. Journal of Beijing Polytechnic University, 2004, 30(4): 423-426 |
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| Authors: | YANG Dao-hong XU Chen DONG Dian-hong LI Lan WU Jun-miao ZHANG Jian-ming YANG Qi-ming JIN Wen-xian ZOU De-shu SHEN Guang-diCollege of Electronic Information & Control Engineering Beijing University of Technology Beijing Optoelectronic Technology Laboratory Beijing China |
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| Affiliation: | YANG Dao-hong,XU Chen,DONG Dian-hong,LI Lan,WU Jun-miao,ZHANG Jian-ming,YANG Qi-ming,JIN Wen-xian,ZOU De-shu,SHEN Guang-diCollege of Electronic Information & Control Engineering,Beijing University of Technology,Beijing Optoelectronic Technology Laboratory,Beijing 100022,China |
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| Abstract: | In order to realize silicon/silicon directly bonding under the ultra-clean environment, a novel method and a physical model for silicon/silicon directly bonding with the help of alcohol were proposed in this paper. Under a one hundred thousands class clean environment and atmosphere pressure, the homemade silicon wafers directly bonding experiment was performed successfully at room temperature. The tensile test showed that the bonding tensile strength is as much as 10MPa. No inter-space in the interface was found by SEM observation. These results imply that the bonding quality is good and can meet the requirement. The method is proved to be practically feasibel. |
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| Keywords: | micro-electronic-machine-system(MEMS) silicon directly bonding(SDB) alcohol |
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