Abstract: | A method for evaluating the energy spectra and temperature dependences of the yield of neutral and charged clusters that consist of N≥5 atoms and are produced by ion bombardment of metals is proposed. The results are presented in the form of simple formulas. Theoretical energy spectra of clusters emitted as a result of bombarding niobium, tantalum, and iron targets by atomic ions of gold or xenon and temperature dependences of the yield of silver clusters produced by bombarding the targets with xenon ions are compared with experimental data. |