陶瓷微板热隔离半导体气体传感器阵列设计与实现

具有高浓度、挥发性、强氧化性的液氯、氮氧化物等危化品泄露、爆炸的安全检测一直是一个难点问题,要求检测传感器具有较宽量程和抗腐蚀设计。基于Al N陶瓷的微热板半导体气体传感器阵列设计,采用耐腐蚀的Al N陶瓷为衬底,物理化学性能稳定的Pt膜作为信号和加热器电极,经杂化修饰的In-Nb复合半导体氧化物为敏感材料,结合柔性光刻剥离工艺和激光微加工工艺,制备了陶瓷微板热隔离气体传感器阵列。为验证传感器阵列热结构设计的合理性,进行了有限元热仿真分析,优化了设计结构。经静态气敏测试分析,传感器阵列对浓度体积比500×10~(-6)的Cl_2和100×10~(-6)的NO_2两种气体的气敏响应时间分别为30 s和60 s左右,灵敏度最高分别为275倍和4倍,且在0~500×10~(-6)和0~100×10~(-6)检测范围均具有良好的气敏特性,对Cl_2等高浓度宽量程危化品气体检测具有良好的应用前景。

Design and realization of ceramic micro plate thermal isolation semiconductor gas sensor arrays

It is a difficult problem to realize the security detection of the leakage and exposure of dangerous and toxic chemicals with high concentration, strong volatility and oxidizability, such as liquid chlorine and nitrogen oxides. To address this problem, wide range and corrosion resistance should be designed for detection sensors. Based on the design of AlN ceramic micro hotplate semiconductor gas sensors array, corrosion resistant AlN ceramic is used as substrate, Pt films with stable physical and chemical properties are used as signal and heating electrodes, and doped In Nb composite semiconductor oxide is used as sensing material. Combined with flexible lithography lift off process and laser micromachining technology, the AlN ceramic micro hotplate thermal isolation gas sensor array is fabricated. In addition, the finite element thermal simulation analysis is used for validating the structural design of sensor array. Experimental results of static gas sensing show that the response time is about 30 s and 60 s for 500×10-6 concentration Cl2 and 100×10-6 concentration NO2, respectively. The highest sensitivity is 275 and 4 for 500×10-6 concentration Cl2 and 100×10-6 concentration NO2, respectively. Good gas sensing properties are obtained in the detection ranges of 0-500×10-6 and 0-100×10-6 for Cl2 and NO2, respectively. It shows the good application future in the gas detection for the dangerous chemicals such as Cl2 with high concentration and wide range.