| 一种消除AFM中悬臂梁横向扭转串扰误差的修正技术 |
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| 引用本文： | 赵学增,周法权,李宁,王飞. 一种消除AFM中悬臂梁横向扭转串扰误差的修正技术[J]. 纳米技术与精密工程, 2011, 9(2): 121-126 |
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| 作者姓名： | 赵学增 周法权 李宁 王飞 |
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| 作者单位： | 1. 哈尔滨工业大学机电工程学院,哈尔滨,150001
2. 哈尔滨工业大学机电工程学院,哈尔滨,150001;上海第二工业大学机电工程学院,上海,201209 |
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| 基金项目： | 国家自然科学基金资助项目，国家博士后科学基金资助项目 |
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| 摘 要： | 串扰效应始终存在于原子力显微镜(AFM)的测量过程中,并影响其测量精度.在对串扰效应的产生机理进行分析,并建立了悬臂梁形变与光斑位置检测器(PSPD)输出信号之间的数学关系的基础上,提出了一种可消除横向扭转串扰影响的修正方法.在该方法中AFM系统可由输出信号直接获得悬臂梁的实际形变量,进而获得原子间作用力的实际值,并通过保持作用力的恒定对样品进行测量.该方法可有效地将悬臂梁扭转导致的纵向信号的变化从系统测得的纵向信号中剔除出去.仿真结果表明,在恒力接触模式下,串扰效应严重影响测量结果,导致测量误差,且针尖.样品夹角导致的串扰效应比摩擦力导致的串扰效应更严重.为验证本文方法消除串扰效应的效果,在应用该修正方法前后分别对标准梯形样品进行测量.实验对比结果表明,在普通恒力接触模式下的样品表面最大测量误差范围为21.2 nm～32.0 nm;对串扰效应进行修正后,最大测量误差范围降低至5.5 nm～10.2 nm.这表明该方法可有效降低AFM中串扰效应导致的测量误差,提高其测量精度.
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| 关 键 词： | 串扰效应 原子力显微镜(AFM) 横向扫描 测量误差 悬臂梁 |
Correction of Cross-Talk Caused by Torsion of Cantilever in AFM |
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| ZHAO Xue-zeng,ZHOU Fa-quan,LI Ning,WANG Fei. Correction of Cross-Talk Caused by Torsion of Cantilever in AFM[J]. Nanotechnology and Precision Engineering, 2011, 9(2): 121-126 |
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| Authors: | ZHAO Xue-zeng ZHOU Fa-quan LI Ning WANG Fei |
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| Affiliation: | ZHAO Xue-zeng 1,ZHOU Fa-quan 1,LI Ning1,2,WANG Fei1(1.School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001,China,2.School of Mechatronics Engineering,Shanghai Second Polytechnic University,Shanghai 201209,China) |
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| Abstract: | Cross-talk effect which always exits in atomic force microscopy(AFM) measurement severely influences the measuring accuracy.The generation mechanism of cross-talk effect was theoretically analyzed and the relationship between deformation of the cantilever and output of position sensitive photo-detecter(PSPD) was established,on which basis a correction method was proposed to eliminate the influence of the cross-talk effect.In the proposed method,AFM system directly obtains the deformation of the cantilever f... |
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| Keywords: | cross-talk effect atomic force microscope(AFM) lateral scan measuring error cantilever |
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