谐振式微加速度计杠杆机构的建模与优化

谐振式微机械加速度计的微尺寸质量块引起的惯性力很小,严重制约了加速度计灵敏度的提高,因此提出采用杠杆机构放大惯性力。由于硅基微杠杆机构的各部分均为刚性连接,且杠杆的输入、输出端有约束存在,制约了杠杆的自由转动,使惯性力不能高效放大。为此,设计了基于柔性支点的杠杆机构,建立了微杠杆机构的物理和数学模型,推导出杠杆机构各部分刚度的匹配原则。利用ISIGHT软件,采用遗传算法对结构参数进行了优化。

Leverage Model and Optimal Design for Micromechanical Resonant Accelerometer

The inertial force caused by micro size mass on micromechanical resonant accelerometer is very small,that badly restricts the improvement of accelerometer sensitivity.So a method of using leverage mechanisms to magnify the inertial force was discussed.Because the parts of Si-based micro leverage are all connected rigidly and there are restraints existing in the input and output of the leverage,the leverage free rotation is confined and thus the inertial force can not be magnified efficiently.Therefore the leverage based on flexible pivot points were designed,the physics and mathematics models of micro leverage were established,and the stiffness matching principle of the leverage's every part was deduced.With the software ISIGHT,the structural parameters were optimized by inherit algorithm.