| 高斯光束对标准硅球直径测量的影响分析 |
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| 引用本文： | 康岩辉,邾继贵,罗志勇,叶声华.高斯光束对标准硅球直径测量的影响分析[J].光学学报,2008,28(11):2148-2152. |
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| 作者姓名： | 康岩辉 邾继贵 罗志勇 叶声华 |
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| 作者单位： | 1. 天津大学精密测试技术仪器国家重点实验室,天津,300072
2. 中国计量科学研究院,北京,100013 |
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| 摘 要： | 针对高精度硅球直径测量系统的特点,分析平面波反射光的多光束干涉和双光束干涉,以及正入射时高斯光束反射光中心的多光束干涉和双光束干涉,对不同条件下的高斯光束反射光中心的干涉光强进行了数值模拟.对采用五步相移算法时高斯多光束干涉的影响进行了研究,给出了特定参数条件下不同束腰ω0和传播距离z时的最大相位误差,当ω0=5 mm,z=2000 mm时的最大相位误差达0.08%.
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| 关 键 词： | 光学测量 硅球直径测量 高斯光束 多光束干涉 |
| 收稿时间： | 2008/2/22 |
Impact Analysis of Gaussian Beam on Measurement of Single Crystal Silicon Sphere Diameter |
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| Kang Yanhui,Zhu Jigui,Luo Zhiyong,Ye Shenghua.Impact Analysis of Gaussian Beam on Measurement of Single Crystal Silicon Sphere Diameter[J].Acta Optica Sinica,2008,28(11):2148-2152. |
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| Authors: | Kang Yanhui Zhu Jigui Luo Zhiyong Ye Shenghua |
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| Abstract: | Aiming at the characteristics of a single crystal silicon sphere diameter measuring system, multiple-beam interference and dual-beam interference of the reflected light of a plane wave and those of the central reflected light of a Gaussian beam with normal incidence are analyzed. Also numerical simulations for the reflected interferential intensity of a Gaussian beam center in different situations are presented. Furthermore, the influence of five-step phase-shifting algorithm on Gaussian multiple-beam interference is studied, and the maximal phase errors are shown with some specific parameters. The maximal phase error is 0.08% for beam waist ω0=5 mm and propagation distance z=2000 mm. |
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| Keywords: | optical measurement silicon sphere diameter measurement Gaussian beam multiple-beam interference |
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