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| 多弧离子镀(Ti,Al,Zr,Cr)N多组元氮化物膜的研究 | |
| 引用本文： | 赵时璐,张钧,刘常升.多弧离子镀(Ti,Al,Zr,Cr)N多组元氮化物膜的研究[J].真空科学与技术学报,2009,29(6). |
| 作者姓名： | 赵时璐 张钧 刘常升 |
| 作者单位： | 1. 东北大学,材料各向异性与织构工程教育部重点实验室,沈阳,110004;沈阳大学,机械工程学院,沈阳,110044 2. 沈阳大学,机械工程学院,沈阳,110044;东北大学,材料各向异性与织构工程教育部重点实验室,沈阳,110004 3. 东北大学,材料各向异性与织构工程教育部重点实验室,沈阳,110004 |
| 基金项目： | 辽宁省高等学校优秀人才支持计划资助项目，长江学者和创新团队发展计划资助 |
| 摘 要： | 采用多弧离子镀技术,使用Ti Al Zr合金靶和Cr靶,在W18Cr4V高速钢基体上沉积(Ti,Al,Zr,Cr)N多组元氮化物膜.利用扫描电镜(SEM)、电子能谱仪(EDS)和X射线衍射(XRD)对薄膜的成分、结构和微观组织进行测量和表征;利用划痕仪、显微硬度计测评薄膜的力学性能.结果表明,获得的多组元氮化物膜仍具有B1 NaCl型的TiN面心立方结构;薄膜的成分除-50V偏压外,其它偏压下的变化均不明显;增大偏压可减少薄膜表面的液滴污染,提高薄膜的显微硬度及膜/基结合力,最高值可分别达到HV3300和190N. |
| 关 键 词： | 无机非金属材料 多弧离子镀 TiN基硬质膜 高速钢 偏压 |
Growth and Mechanical Properties of Multi Component (Ti,Al,Zr,Cr) N Coatings by Multi Arc Ion Plating |
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| Zhao Shilu,Zhang Jun,Liu Changsheng.Growth and Mechanical Properties of Multi Component (Ti,Al,Zr,Cr) N Coatings by Multi Arc Ion Plating[J].JOurnal of Vacuum Science and Technology,2009,29(6). | |
| Authors: | Zhao Shilu Zhang Jun Liu Changsheng |
| Abstract: | The multi-component (Ti,Al,Zr,Cr) N coatings were deposited by multi-arc ion plating on high speed steel substrates(W18Cr4V).The microstructures and mechanical properties of the coatings were characterized with X-ray diffraction (XRD),X-ray energy dispersion spectroscopy (EDS),scanning electron microscopy (SEM) and conventional surface probes.The impacts of the coating growth conditions on its microstructures and properties were studied.The results show that the TiN(Bl-NaCl) face-centered cubic phase exists in the multi-component (Ti,Al,Zr,Cr) N coatings,and that the bias voltage,except -50V,little affects its stoichiometries.Interesting finding is that an increase of the bias reduces the surface wettability of some liquids,and enhances its micro-hardness and adhesion at the film/substrate interface up to 3300HV and 190N,respectively. |
| Keywords: | Inorganic non-metallic materials Multi-arc ion plating TiN base hard film High speed steel Bias voltage |
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