Parallel phase-shifting interferometry based on Michelson-like architecture |
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Authors: | Min Junwei Yao Baoli Gao Peng Guo Rongli Zheng Juanjuan Ye Tong |
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Affiliation: | State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China. |
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Abstract: | In this paper, we present a new scheme for parallel phase-shifting interferometry that employs a Michelson-like architecture and a simple polarization unit to generate two phase-shifting interferograms with phase shift of π/2 at a single camera exposure. The parallel phase-shifting unit is built with simple optical components, and the distance between the parallel interferograms can be adjusted conveniently. Phase reconstruction is performed by using an algorithm developed for two-step phase-shifting interferometry. The practicability of the proposed configuration and the reconstruction method is demonstrated by experiments. |
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