| 一种三次非旋转对称的相位板的检测系统设计 |
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| 引用本文： | 许英朝,张新,周平. 一种三次非旋转对称的相位板的检测系统设计[J]. 光学学报, 2008, 28(5): 971-975 |
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| 作者姓名： | 许英朝 张新 周平 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所光学技术研究中心,吉林,长春,130033;中国科学院研究生院,北京,100039;中国科学院长春光学精密机械与物理研究所光学技术研究中心,吉林,长春,130033;美国亚利桑那大学光学中心,图森,Az85721 |
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| 基金项目： | 中国科学院长春光机所三期创新重点支持项目 |
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| 摘 要： | 作为零位干涉检测方法中非常有前途的一种方法.计算全息可以用于非旋转对称的非球面的检测.以三次相位板为例,阐述了利用计算全息图检测非旋转对称的非球面的基本原理.分析并推导了三次相位传播过程引入的高阶波像差的理论公式,给出了三次相位板的检测系统的没计结果.详细讨论了计算全息图衍射级次的分离以及计算全息图的二元化,给出了振幅型的计算全息图的图样.计算全息图的刻线最小问隔是40μm,计算全息图的制作精度对检测结果的波前误差的影响仅仅为0.005λ.对检测系统作了详细的公差分析,结果表明所有调整公差对整个检测系统的影响和方根值为83.954 nm.
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| 关 键 词： | 光学设计 计算全息 检测 级次分离 公差分析 |
| 收稿时间： | 2007-08-07 |
Optical Design for Unsymmetrical Aspherical Cubic Phase Plate Testing System |
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| Xu Yingchao,Zhang Xin,Zhou Ping. Optical Design for Unsymmetrical Aspherical Cubic Phase Plate Testing System[J]. Acta Optica Sinica, 2008, 28(5): 971-975 |
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| Authors: | Xu Yingchao Zhang Xin Zhou Ping |
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| Abstract: | As one of the most promising methods in all the interferometric null tests, computer-generated holograms (CGH) can also be used in unsymmetrical aspherical surfaces testing. Taking the cubic surface as an example, the principle of testing unsymmetrical aspherical surfaces with CGH is given. The expression of the aberration for the cubic phase during propagation is deduced, and the results of the optical design for the cubic surface test system are listed. The separation of diffraction orders and the binary process of the continuous CGH phase function are discussed in detail, and the sample of the amplitude CGH is given. The minimum line spacing of the CGH is 40 μm and its effect on wavefront error is only 0.005λ. The tolerance analysis of testing system is done in detail, and the total effect from all alignment tolerances that affect testing system is 83.954 nm (root-mean-square). |
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| Keywords: | optical design computer-generated hologram (CGH) testing order separation tolerance analysis |
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