| CVD金刚石膜高速机械研磨温度场的有限元模拟 |
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| 引用本文： | 王新玲,周丽,黄树涛,许立福. CVD金刚石膜高速机械研磨温度场的有限元模拟[J]. 金刚石与磨料磨具工程, 2011, 31(5): 20-24. DOI: 10.3969/j.issn.1006-852X.2011.05.005 |
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| 作者姓名： | 王新玲 周丽 黄树涛 许立福 |
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| 作者单位： | 沈阳理工大学机械工程学院,沈阳,110159 |
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| 基金项目： | 辽宁教育厅创新团队(No.LT1010089) |
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| 摘 要： | CVD金刚石膜的高速机械研磨是一种高效的研磨方法,研磨区域的温度场分布直接影响金刚石膜的研磨质量.本文采用三维热-力耦合有限元法对三种不同运动条件下的温度场进行分析.结果表明:在不同的运动条件下,金刚石膜表面的温度场呈不均匀分布.当金刚石膜与砂轮作同向运动时,整个金刚石膜的温度差最小.文中得出的结论可以为提高工件表面平...
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| 关 键 词： | CVD金刚石膜 温度场 机械研磨 有限元法 |
Finite element simulation of the temperature field of CVD diamond films during high-speed mechanical polishing |
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| Wang Xinling,Zhou Li,Huang Shutao,Xu Lifu. Finite element simulation of the temperature field of CVD diamond films during high-speed mechanical polishing[J]. Diamond & Abrasives Engineering, 2011, 31(5): 20-24. DOI: 10.3969/j.issn.1006-852X.2011.05.005 |
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| Authors: | Wang Xinling Zhou Li Huang Shutao Xu Lifu |
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| Affiliation: | Wang Xinling Zhou Li Huang Shutao Xu Lifu(School of Mechanical Engineering,Shenyang Ligong University,Shenyang 110159,China) |
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| Abstract: | High-speed mechanical grinding of chemical vapor deposition(CVD) diamond films is an efficient grinding method,and the temperature field of grinding region affects the grinding quality of diamond films directly.In this paper,the temperature field was investigated by using three-dimensional thermo-mechanical coupling finite element method under three different movement conditions.The results indicated that the distribution of temperature on diamond films was inhomogeneous under different movement conditions.... |
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| Keywords: | CVD diamond films temperature field mechanical grinding finite element method |
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