Al2O3和Cr过渡层对Ag膜光学性质及其附着力的影响

研究了在玻璃基底上镀制Al2O3和Cr过渡层对Ag膜反射率及附着力的影响.分光光度计测试了Ag膜的反射率,结果表明,与Cr过渡层相比,Al2O3过渡层对Ag膜反射率的降低相对较小;而且,随着Al2O3厚度的增加,Ag膜的反射率先增大后减小.XRD与AES测试表明,引入Al2O3或Cr可明显细化Ag晶粒,减弱Ag膜(111)织构;Al2O3作过渡层时,Al原子向Ag层中扩散显著;而Cr作过渡层时,只有少量Cr原子扩散进入Ag层.因此,Al2O3作过渡层能显著增强薄膜与玻璃基体之间的附着力.

Effects of Al2O3 and Cr Interlayers on the Optical Property and Adhesion of Ag Film

Properties of Ag film deposited on BK7 glass substrate with Al_2O_3 and Cr intermediate layers were investigated by using spectrophotometer,XRD,AES and adhesion test.The results showed that the effect of Al_2O_3 interlayer on the reflectivity of Ag film is smaller compared with Cr interlayer. And with increasing Al_2O_3 interlayer thickness,the reflectivity of Ag fihn increased firstly and then decreased.On the other hand,introducing Al_2O_3 and Cr interlayers,the Ag grains are refined and the(111)texture of Ag film are weakened due to the diffusion of aluminum and Cr atoms to the growth face,thus resulting in the decrease of reflectivity of Ag film.Grain refining could improve the virtual contacting area between Ag film and substrate during depositing initiation.Alumina interlayer enhanced the adhesion between Ag film and glass substrate,which attributed to more Al atoms diffusing to the Ag film than Cr atoms.