Development of Run-To-Run (R2R) controller for the multiple-input multiple-output (MIMO) system using fuzzy control theories

Run-to-Run (R2R) control has been extensively applied in semiconductor manufacturing. In particular, del Castillo, E. and Rajagopal, R., A multivariate double EWMA process adjustment scheme for drifting processes. IIE Trans., 2002, 34, 1055–1068, investigated double multivariate exponentially weighted moving average (MEWMA) controller for the multiple-input multiple-output (MIMO) system in an attempt to adjust and maintain the linear dynamic process outputs on target. Multivariate fuzzy control, inherently different from conventional MEWMA-based control, is another promising alternative that consists of fuzzy logic and set concept. Providing the fuzzy control can structure an appropriate membership function for the R2R MIMO system, thus it can be shown a practically useful control tool in comparison to MEWMA control. In this paper, fuzzy logic is utilized to design the multivariate fuzzy controller for the type of R2R applications based primarily on the min-max-gravity method advocated by Gupta, M.M., Kiszka, J.B. and Trojan, G.M., Multivariable structure of fuzzy control systems. IEEE Trans. Sys., Man Cybern., 1986, 16, 638–656. Under a variety of disturbance models, the proposed multivariate fuzzy controller can produce quite competitive control performance when compared to MEWMA control.