| CVD金刚石的形核和生长 |
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| 引用本文： | 黄元盛,邱万奇,罗承萍,陈灵.CVD金刚石的形核和生长[J].理化检验(物理分册),2006,42(8):382-385. |
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| 作者姓名： | 黄元盛 邱万奇 罗承萍 陈灵 |
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| 作者单位： | 1. 韶关学院机电系,韶关,512005
2. 华南理工大学机械工程学院,广州,510640 |
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| 基金项目： | 广东省自然科学基金项目（013004,04300026）韶关市科技计划项目（2004-14）. |
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| 摘 要： | 应用自制的热解丝CVD装置，研究了在金刚石沉积过程中改变甲烷浓度对其形核和生长的影响。结果表明，金刚石形核后，增加甲烷浓度，仍然可以在硅基底表面继续形成新的晶核。但是甲烷浓度由0．6％逐渐增加到1．2％时，所得最终形核密度比一开始就将甲烷浓度设为1．2％的形核密度低。新晶核比先形成的晶核具有较大的长大速度，随后所有晶核尺寸逐渐趋向相同。
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| 关 键 词： | 化学气相沉积 金刚石 形核 |
| 文章编号： | 1001-4012（2006）08-0382-04 |
| 收稿时间： | 2006-03-27 |
| 修稿时间： | 2006-03-27 |
NUCLEATION AND GROWTH OF CVD DIAMOND |
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| HUANG Yuan-sheng,QIU Wan-qi,LUO Cheng-ping,CHEN Ling.NUCLEATION AND GROWTH OF CVD DIAMOND[J].Physical Testing and Chemical Analysis Part A:Physical Testing,2006,42(8):382-385. |
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| Authors: | HUANG Yuan-sheng QIU Wan-qi LUO Cheng-ping CHEN Ling |
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| Affiliation: | 1. Department of Mechano-Electronics, Shaoguan University, Shaoguan 512005, China; 2. College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China |
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| Abstract: | The nucleation and growth of diamond was investigated by changing methane concentration during diamond deposition using the self-made hot-filament CVD apparatus. The results show that after nucleation, new nucleus can form again on the silicon substrate surface when the methane concentration increases. However, the final nucleus density obtained on gradually increasing the methane concentration from 0. 6% to 1.2% is smaller than that deposited at a methane concentration of 1.2%. The growth rate of the new nuclei is larger than that of the earlier and thus all nuclei tend to have the same size. |
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| Keywords: | Chemical vapor deposition(CVD) Diamond Nucleation |
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