射频器件超细引线键合工艺及性能研究

作为有源相控阵雷达的关键组成部分，T/R （Transmitter and receiver）组件的尺寸与性能决定着装备的重量和功能。引线键合是T/R组件中常用的互连技术之一，随着组件集成度的提高势必也要开发相应的高密度引线键合技术，这使得键合线的尺寸越来越小，而超细的引线会使焊点力学性能降低，造成可靠性下降等问题。采用超声热压楔形键合的方法实现了的超细金丝与金焊盘的连接，并对工艺进行优化。结果表明，随键合压力、键合时间和超声功率的增大，键合后引线形变量逐渐增大，而键合后金丝的拉力先增加后减小，且工艺参数对金带形变量的影响小于金丝；由于第二焊点作用力过大会导致引线形变量较大、最大拉力小于第一焊点，需增加题焊点数量；最后，通过正交试验方法获得了金线和金带的最佳键合工艺参数，实现了超细尺寸引线的键合，对T/R组件的小型化具有重要意义。

Study on Ultrafine Wire Bonding and Performance of Radio Frequency Devices

The surface roughening defects in aluminum alloy tube bending seriously deteriorate the surface quality and service performance. It is urgent to find out the rules of surface roughening formation during the forming process to avoid the occurrence of such defects. A macroscopic finite element model of tube bending cannot reasonably describe the mesoscale inhomogeneous deformation induced surface roughening behavior, while the mesoscale mechanical model can hardly be applied to the practical forming process with complicated boundary conditions. The representative volume element(RVE) meso-model based on Voronoi diagram and crystal plasticity theory is introduced into the macro finite element model to establish a three-dimensional macro-meso coupling model for aluminum tube bending. Then the above macro-meso coupling model is applied to study the surface roughening characteristics of the 5052-O aluminum tube during bending and systematically analyze the influence of microstructure parameters on surface roughening behavior during bending. The results show that the smaller the grain size, the smaller the strain difference between the grain interior and the grain boundary, the more uniform the deformation, and the smaller the surface roughness; for the model with mixture of Cube texture and Random texture, with the increase of the content of Cube texture, the surface roughness after bending deformation decreases; the coupling between the texture distribution and loading method affects the surface roughening behavior.