碳纳米管压阻微悬臂梁红外热探测器的研究

研究了压阻复合层微机械悬臂梁红外探测器的热挠曲理论模型。利用IC工艺和微机械加工技术设计制作了一种硅/铝/碳纳米管三层微机械悬臂梁红外探测器，该探测器基于硅和铝两种材料热膨胀系数的差异，存在双物质效应，不同温度下梁的挠度不同，其形变可通过梁根部的压敏电桥检测。为提高探测器的红外吸收特性，实验探索出了在微机械悬臂梁上涂敷碳纳米管吸热层的工艺方法。实验研究了具有碳纳米管薄膜吸热层的三层微机械悬臂梁红外热探测器对红外辐射的响应规律,结果表明涂敷碳纳米管吸热层使响应灵敏度提高近一倍。

Research on the Micro-cantilever Thermal Infrared Detector with Carbon Nanotubes

The thermal deflection theoretical model of a pizeoresistive composite micro-cantilever for thermal Infrared detector is studied. A novel tri-layer Si-based micro-cantilever thermal infrared detector with carbon nanometer tube film is fabricated using standard integrated circuit and micro-mechanical process technology. It is based on the characteristics that the composite micro-cantilever bend in response to incident IR thermal radiation due to the bi-material effect by different thermal expansion coefficient of Al and Si. The bending of micro-cantilever is piezoresistively detected. Furthermore, a new infrared absorbing layer material—carbon nanotubes (CNTs) is coated in order to enhance infrared radiation absorbing characteristic. The input-output characteristic of the piezoresistive micro-cantilever IR thermal detector with carbon nanometer tube film is studied by experiment. The experimental result shows that carbon nanotubes as the absorbing layer of a micro-mechanical cantilever could achieve higher sensitivity. The power resolution is increased twice.