| 基于聚合物-碳黑敏感膜的气体微传感器阵列研究 |
| |
| 引用本文： | 孙晓翔,谢海芬,杨秋冬,黄宜平. 基于聚合物-碳黑敏感膜的气体微传感器阵列研究[J]. 传感器与微系统, 2005, 24(3): 18-20,23 |
| |
| 作者姓名： | 孙晓翔 谢海芬 杨秋冬 黄宜平 |
| |
| 作者单位： | 1. 复旦大学,微电子系,上海,200433
2. 华东理工大学,物理系,上海,201512 |
| |
| 摘 要： | 研究了一种使用聚合物-碳黑混合物作为敏感膜的新型化学气体传感器。通过将4种不同的聚合物敏感材料聚-4-乙烯基苯酚、聚环氧乙烷、聚已内酯和乙烯-醋酸乙烯酯共聚物与一定配比的碳黑混合物分别淀积在梳状微电极上,就可以获得这4种聚合物-碳黑化学电阻型气体微传感器阵列。用这4种传感器对4种气体体积分数为5×10-4的有机类气体(丙酮、乙醇、甲醇和甲苯)进行了测试,比较了传感器的电阻变化率。微传感器的响应值,即电阻的变化率最大接近1.9%;最小的优于0.01%。梳状微电极的形状适合低体积分数的探测。通过对4种传感器响应的主成分分析,可以完全分辨被检测的4种有机类气体。
|
| 关 键 词： | 气体微传感器 聚合物 碳黑 |
| 文章编号： | 1000-9787(2005)03-0018-03 |
Investigation of gas microsensors array based on polymer-carbon black sensitive film |
| |
| SUN Xiao-xiang,XIE Hai-fen,YANG Qiu-dong,HUANG Yi-ping. Investigation of gas microsensors array based on polymer-carbon black sensitive film[J]. Transducer and Microsystem Technology, 2005, 24(3): 18-20,23 |
| |
| Authors: | SUN Xiao-xiang XIE Hai-fen YANG Qiu-dong HUANG Yi-ping |
| |
| Abstract: | A novel chemical gas sensor that utilizes polymer-carbon black composition as sensitive film is studied.With the deposition of four organic gas sensitive composite polymer films which are poly(4-vinyl phenol),poly(ethylene oxide),poly(caprolactone)and poly(ethylene-co-vinyl acetate) on the interdigitated microelectrodes,four polymer-carbon black chemiresistive gas microsensors are fabricated.The resistance changes of sensors to four organic gases (i.e.acetone,ethanol,methanol and toluene) at 5×10~(-4) volume fraction are examined.The response (ΔR/R) of microsensors is from 1.9% to 0.01% and the configuration of interdigitated microelectrodes is suitable for low volume fraction.By principal component analysis of responses of microsensors,it is clear that four kinds of different organic gases can be completely discriminated. |
| |
| Keywords: | gas microsenors polymer carbon black |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
