常压封装下隧道磁阻微陀螺的高灵敏结构设计

针对现有微陀螺难以实现常压封装下高灵敏检测的难题，设计了两种应用隧道磁阻效应检测的微陀螺结构，分别采用面内检测与离面检测，本文从阻尼与检测磁场两方面对二者性能进行分析。首先通过对二者阻尼的计算，得到常压下面内检测结构的灵敏度为35.18 nm/(°/s)，离面检测结构的灵敏度为3.19 nm/(°/s)，面内结构比离面结构的灵敏度高约10倍，从阻尼方面考虑，采用面内检测的结构更优；其次设计了应用于两种结构中的检测磁场，得到了面内检测磁场相比于离面检测磁场具有更高的磁场变化率，更好的磁场一致性，从磁场方面考虑，同样得到面内检测的微陀螺结构更优。因此，应用面内检测结构可以实现隧道磁阻微陀螺在常压下的高灵敏检测。

High sensitive structure desigin of Tunnel magnetoresistance microgyroscope under atmospheric pressure

In view of the sensitive of micro gyroscope is difficult to be higher when works under normal pressure packaging,two structures of micro gyroscope,using in-plane detection and out-plane detection respectively,are de?signed with the detection mechanisms of tunnel magnetoresistance. To analyze the performance of two structures , damping and detection magnetic field are considered. Firstly,damping is calculated respectively,which the sensitiv?ity of in-plane structure’s is 35.18 nm/(°/s) and the out-plane structure is 3.19 nm/(°/s) at atmospheric pressure. The former is 10 times higher than the latter,so the in-plane structure is better in the point of damping;Then the de?tection magnetic fields applying to two structures are designed,and the in-plane structure gets higher magnetic field sensitivity and better consistency compared with out-plane structure. So the in-plane structure is optimal both at the aspect of damping and detection magnetic field. Therefore,the in-plane structure of micro gyroscope based on the tunnel magnetoresistance effect can realize high sensitivity at atmospheric pressure.