| 电子回旋共振放电的电离特性PIC/MCC模拟(Ⅰ)——物理模型与理论方法 |
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| 引用本文： | 金晓林,杨中海.电子回旋共振放电的电离特性PIC/MCC模拟(Ⅰ)——物理模型与理论方法[J].物理学报,2006,55(11):5930-5934. |
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| 作者姓名： | 金晓林 杨中海 |
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| 作者单位： | 电子科技大学物理电子学院，成都 610054 |
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| 摘 要： | 采用粒子模拟与蒙特卡罗相结合(PIC/MCC)的方法对电子回旋共振(ECR)放电中的电离过程进行了模拟，其中带电粒子与微波的相互作用由PIC方法的电磁模型描述，粒子间的碰撞过程由MCC方法描述.考虑的碰撞类型有电子与中性粒子的弹性、激发、电离碰撞，离子与中性粒子的弹性、电荷交换碰撞，碰撞截面均依赖于能量而变化.阐述了理论分析的过程，为数值模拟ECR放电奠定了基础.
关键词：
电子回旋共振放电
粒子模拟
蒙特卡罗
电离
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| 关 键 词： | 电子回旋共振放电 粒子模拟 蒙特卡罗 电离 |
| 文章编号： | 1000-3290/2006/55(11)/5930-05 |
| 收稿时间： | 4/4/2006 12:00:00 AM |
| 修稿时间： | 2006-04-042006-04-26 |
The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge ( Ⅰ )——Physical model and theoretical methods |
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| Jin Xiao-Lin,Yang Zhong-Hai.The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge ( Ⅰ )——Physical model and theoretical methods[J].Acta Physica Sinica,2006,55(11):5930-5934. |
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| Authors: | Jin Xiao-Lin Yang Zhong-Hai |
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| Affiliation: | College of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China |
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| Abstract: | We present a theoretical and computational model to study the ionization of the electron cyclotron resonance(ECR)microwave discharge using a quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision method.The interaction between the charged particles and microwave fields are described by particle-in-cell method.The collision processes are treated with Monte Carlo method.Elastic,excitational,and ionizing electron-neutral collisions and elastic,charge exchange ion-neutral collisions are included.The cross sections are the functions of particle's energy.The theoretical part of simulation is introduced in detaid as foundation of the numerical simulation. |
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| Keywords: | electron cyclotron resonance discharge particle-in-cell Monte Carlo methods ionization |
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