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High reliability sputtered Schottky diodes on GaAs
Authors:Q. P. Pham   W. M. Kelly   P. Maaskant  J. O'Brien
Affiliation:(1) National Microelectronics Research Centre, University College, Lee Maltings, Prospect Row, Cork, Ireland
Abstract:We describe developments to improve reliability and power handling for high frequency applications in whisker-contacted Schottky barrier diode mixers, detectors and multipliers fabricated using sputtered refractory metals and silicides. The lift-off process has been used to fabricate diodes on GaAs with ideality factors of 1.18 and 1.06 for W/GaAs and TiSix/GaAs contacts respectively.
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