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InGaN/GaN multiple quantum well green light-emitting diodes prepared by temperature ramping
Authors:T C Wen  S J Chang  Y K Su  L W Wu  C H Kuo  W C Lai  J K Sheu  T Y Tsai
Affiliation:(1) Institute of Microelectronics and Department of Electrical Engineering, National Cheng Kung University, 70101 Tainan, Taiwan;(2) South Epitaxy Corporation, 744 Hsin-Shi, Taiwan;(3) Optical Science Center, National Central University, 320 Chung-Li, Taiwan
Abstract:High-quality InGaN/GaN multiple-quantum well (MQW) light-emitting diode (LED) structures were prepared by a temperature-ramping method during metal-organic chemical-vapor deposition (MOCVD) growth. Two photoluminescence (PL) peaks, one originating from well-sensitive emission and one originating from an InGaN quasi-wetting layer on the GaN-barrier surface, were observed at room temperature (RT). The observation of high-order double-crystal x-ray diffraction (DCXRD) satellite peaks indicates that the interfaces between InGaN-well layers and GaN-barrier layers were not degraded as we increased the growth temperature of the GaN-barrier layers. With a 20-mA and 160-mA current injection, it was found that the output power could reach 2.2 mW and 8.9 mW, respectively. Furthermore, it was found that the reliability of the fabricated green LEDs prepared by temperature ramping was also reasonably good.
Keywords:InGaN/GaN  multiple-quantum well (MQW)  green light-emitting diode (LED)  PL  reliability
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