sol-gel法制备ATO薄膜的结构与光学性能研究

采用sol-gel法在玻璃衬底上制备ATO(SnO2∶Sb)薄膜,并用XRD、SEM、紫外-可见光谱和光致发光对薄膜进行了表征,研究了ATO薄膜的结构和光学性能。结果表明:ATO薄膜微晶晶相与SnO2一致,仍然是四方金红石结构;ATO薄膜在可见光区的透过率超过80%,当r(Sb∶Sn)为0.15时,ATO薄膜的透过率最高达87%;ATO薄膜在344～380nm处有一个很强的紫外-紫光发射带,随着Sb掺杂量的增加,发射峰逐渐变强,在r(Sb∶Sn)为0.25时,发射峰相对强度达302.4。

Study on structure and optical properties of ATO thin films prepared by sol-gel method

Sb-doped SnO_2(ATO) thin films were prepared on glass substrates by sol-gel method.The thin films were characterized by XRD,SEM,UV-Vis spectroscopy and photoluminescence(PL).The structure and optical properties of ATO thin films were studied.The results show that the microcrystalline of ATO thin films is the same as SnO_2 of quartet rutile structure.The mean transmittances of the ATO thin films are higher than 80% in visible region,ATO thin films doped with Sb(r(Sb:Sn)=0.15)have high transmittance of 87%.ATO thin films have strong luminescence band of UV-PL in 344～380 nm.The luminescence peak becomes stronger with the increase of Sb doping amount.When r(Sb:Sn) is 0.25,the relative intensity of luminescence peak is up to 302.4.