高精度柱面镜加工技术研究

光学柱面镜在强激光系统和同步辐射光束中有着广泛的应用,对柱面镜的精度要求也越来越高。采用传统光学表面成型技术与数控加工设备相结合的工艺方法对柱面镜进行加工。根据精磨时工件表面粗糙度与材料去除率随研磨时间的变化规律,确定了最佳的研磨时间,并通过对研磨液在不同浓度、温度时材料去除率的研究,优化了抛光的工艺参数。通过反复的加工和检测分析,得到满足光学系统要求的柱面镜,经过轮廓仪检测,柱面透镜能够达到PV≤0.1358μm。

Research on Processing Technology of High Precision Cylindrical Lens

The optical cylindrical lens has a wide range of application in the high power laser system and the synchro-tron radiation. Furthermore the accuracy of cylindrical lens will need to be high. The cylindrical lens is machined by the surface molding technology of traditional optics and CNC machining equipment. During the change of surface roughness of the parts and the removal rate of material, we have no doubts what our optimal grinding time is. Furthermore, we base material removal rate of grinding fluid on different temperature and concentration,and the polishing parameters are optimized. According to repeatedly comparison and inspection analysis, we get the cylindrical lens that satisfies the re-quirements of optical system. Moreover,after contourgraph detection,the cylindrical lens is able to reach Rt≤0.1358μm