Tribological properties of diamond-like carbon films deposited by pulsed laser arc deposition |
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Authors: | Zhang Zhen-Yu Lu Xin-Chun and Luo Jian-Bin |
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Affiliation: | State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China; Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China |
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Abstract: | A novel method, pulsed laser arc deposition combining the advantages
of pulsed laser deposition and cathode vacuum arc techniques, was
used to deposit the diamond-like carbon (DLC) nanofilms with
different thicknesses. Spectroscopic ellipsometer, Auger electron
spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy,
atomic force microscopy, scanning electron microscopy and
multi-functional friction and wear tester were employed to
investigate the physical and tribological properties of the deposited
films. The results show that the deposited films are amorphous and
the sp$^{2}$, sp$^{3}$ and C--O bonds at the top surface of the films
are identified. The Raman peak intensity and surface roughness
increase with increasing film thickness. Friction coefficients are
about 0.1, 0.15, 0.18, when the film thicknesses are in the range of
17--21~nm, 30--57~nm, 67--123~nm, respectively. This is attributed to
the united effects of substrate and surface roughness. The wear
mechanism of DLC films is mainly abrasive wear when film thickness
is in the range of 17--41~nm, while it transforms to abrasive
and adhesive wear, when the film thickness lies between 72 and 123~nm. |
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Keywords: | pulsed laser arc deposition diamond-like carbon tribological
property physical property |
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