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铅过量PLZT铁电薄膜的制备及其电学性质研究
引用本文:侯识华,宋世庚,马远新,郑毓峰. 铅过量PLZT铁电薄膜的制备及其电学性质研究[J]. 材料科学与工程学报, 2001, 19(3): 43-47
作者姓名:侯识华  宋世庚  马远新  郑毓峰
作者单位:1. 中国科学院新疆物理研究所
2. 新疆医科大学
3. 新疆大学物理系
基金项目:国家自然科学基金,19702016,
摘    要:采用Sol Gel法 ,在Pt TiO2 Si基片上制备了具有不同铅过量 (0— 2 0mol% )的PLZT铁电薄膜。分析了薄膜的晶相结构 ,研究了铅过量对PLZT铁电薄膜的介电性能和铁电性能的影响。结果表明 ,各薄膜均具有钙钛矿型结构 ,且各薄膜均呈 (110 )择优取向。PLZT铁电薄膜的介电性能和铁电性能随铅过量的变化而改变。铅过量为 10mol%的薄膜具有最佳的的介电性能和铁电性能。

关 键 词:Sol-Gel法  PLZT  铁电薄膜  铅过量  电学性质
文章编号:1004-793(2001)03-0043-05
修稿时间:2001-01-06

Preparation of PLZT Ferroelectric Thin Films with Different Excess Pb and Their Electrical Properties
HOU Shi-hua ,SONG Shi-geng ,MA Yuan-xin ,ZHENG Yu-feng. Preparation of PLZT Ferroelectric Thin Films with Different Excess Pb and Their Electrical Properties[J]. Journal of Materials Science and Engineering, 2001, 19(3): 43-47
Authors:HOU Shi-hua   SONG Shi-geng   MA Yuan-xin   ZHENG Yu-feng
Affiliation:HOU Shi-hua 1,SONG Shi-geng 1,MA Yuan-xin 2,ZHENG Yu-feng 3
Abstract:PLZT ferroelectric thin films with 0mol% to 20mol% excess Pb have been prepared by a sol-gel method on Pt/TiO 2/Si substrates.The crystalline structures of the PLZT films were analyzed by the X-ray diffractometry(XRD).The effect of Pb content on the dielectric and ferroelectric properties of the PLZT thin films have been studied. All PLZT films had a perovskite structure with the <110> preferred orientation.The dielectric and ferroelectric properties of the PLZT thin films varies with Pb content.The film with 10mol% excess Pb has the optimum dielectric and ferroelectric properties .
Keywords:sol-gel method  PLZT  ferroelectric thin films  quantity of excess Pb  electrical properties
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