高温电涡流传感器感应探头的优化设计

为解决电涡流传感器探头在高温(600℃)环境中测量失效的问题,设计了一种感应探头结构,主要由低温共烧陶瓷基底和Ag线圈组成.首先分析涡流检测的原理和普通探头在高温下失效的原因,根据要求选择低温共烧陶瓷作为基底材料,为在一定区域内提高电感值将线圈设计为多层立体螺旋结构.通过电磁仿真和机械—热仿真确定线圈的形状、材料等,结...

Optimal Design of Induction Probe of High Temperature Eddy Current Sensor

In order to solve the problem of measurement failure of the eddy current sensor probe in high temperature(600℃)environment,an induction probe structure was designed,which was mainly composed of a low-temperature co-fired ceramic substrate and an Ag coil.First,the principle of eddy current testing and the reasons for the failure of ordinary probes were analyzed at high temperature.According to the requirements,low-temperature co-fired ceramics were selected as the base material,and the coil was designed as a multilayer three-dimensional spiral structure in order to increase the inductance value in a certain area.The shape and material of the coil were determined through electromagnetic simulation and mechanical-thermal simulation,and parameters such as coil diameter,spacing,number of turns and so on were optimized in combination with MATLAB genetic algorithm.Then,according to the design parameters of the coil,the induction probe structure was fabricated through processes such as punching,filling,screen printing,and laminating sintering.Finally,the geometric parameters and electromagnetic characteristics of the coil were measured.Experiments show that the error of the coil diameter is less than 5%,the self-resonant frequency reaches 1.8 MHz,and the no-load quality factor at the operating frequency is greater than 30,which has a high linear measurement range and sensitivity.