B2O3对LTPS用基板玻璃结构和黏温性能的影响

以LTPS用无碱基板玻璃配比料方,探讨B₂O₃对无碱硼铝硅酸盐玻璃结构和黏温性能的影响。通过红外光谱和X射线光电子能谱对玻璃试样进行网络结构分析,并测试了玻璃试样的高温黏度、软化点温度、退火点温度和应变点温度。结果表明:B₂O₃含量较低(0.13%)时,B³⁺以四配位的BO₄]存在;随着B₂O₃含量升高,满足BO₄]形成之外的B;逐渐以BO₃]的形式存在;BO₃]含量增多,玻璃黏度逐渐下降。

Effect of B2O3 on Structure and Viscosity-temperature Properties of the Substrate for LTPS

Using the non-alkali substrate glass for LTPS,the effect of B₂O₃ on the structure and viscositytemperature properties of alkali-free boro-aluminosilicate glass was discussed.The structure of the glass was analyzed by FTIR and XPS,and the high-temperature viscosity,softening point temperature,annealing point temperature and strain point temperature of the glass were tested.The results show that:when the content of B₂O₃ is low(0.13%),B³⁺ exists as four-coordinatedBO₄];as the content of B₂O₃ increases,B³⁺that satisfies the formation ofBO₄]gradually exists in the form ofBO₃];with the content ofBO₃]increasing,the viscosity ofthe glass gradually decreases.