| 一种基于多铁压电纳米纤维压力传感器设计 |
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| 引用本文： | 汪海涛,谭晓兰,李佳玮.一种基于多铁压电纳米纤维压力传感器设计[J].传感器与微系统,2014,33(9):94-96. |
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| 作者姓名： | 汪海涛 谭晓兰 李佳玮 |
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| 作者单位： | 北方工业大学机电工程学院,北京,100144 |
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| 基金项目： | 国家自然科学基金资助项目，北京市自然科学基金资助项目 |
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| 摘 要： | 设计了一种基于静电纺丝技术制备的多铁压电纳米纤维微压力传感器结构,对其工作原理做出了理论分析。近似平行排列的纳米纤维沉积到叉指电极上,电极材料生长于硅基底方形弹性膜片上表面,用小挠度理论设计计算了方膜结构,并对固支结构的纤维进行了力学分析。由纤维压电效应计算出传感器输出电压,并对传感器的结构尺寸进行比较分析,以提高传感器输出电压。
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| 关 键 词： | 微压力传感器 静电纺丝 多铁压电纳米纤维 弹性膜片 |
Design of a kind of pressure sensor based on multiferroic piezoelectric nano-fiber |
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| WANG Hai-tao,TAN Xiao-lan,LI Jia-wei.Design of a kind of pressure sensor based on multiferroic piezoelectric nano-fiber[J].Transducer and Microsystem Technology,2014,33(9):94-96. |
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| Authors: | WANG Hai-tao TAN Xiao-lan LI Jia-wei |
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| Affiliation: | ( College of Electvomechanical Engineering, North China University of Teclmology, Beijing 100144, China) |
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| Abstract: | Design structure of a micro pressure sensor based on multiferroic piezoelectric flano-fiber with electrospinning technology, and theoretical analysis of working principle is carried out. The nano-fiber approximate arranged in parallel is depositted to interdigital electrode. Electrode material grows on square elastic diaphragm of silicon substrate surface,the square elastic diagram is designed and calculated by theory of little deflection, then mechanical analysis is carried out on fixed structure nano-fiber. Output voltage of sensor can be calculated by fiber piezoelectric effect , comparative analysis on structure size of sensor is carried out, to improve output voltage of sensor. |
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| Keywords: | micro pressure sensor electrospinning multiferroic piezoelectric nano-fiber elastic diaphragm |
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