| NiCr薄膜微加热器在低温环境下的电学特性研究 |
| |
| 引用本文： | 吴婷婷,刘景全,江水东,徐斌,郭杰,杨斌.NiCr薄膜微加热器在低温环境下的电学特性研究[J].传感器与微系统,2014,33(9):38-41. |
| |
| 作者姓名： | 吴婷婷 刘景全 江水东 徐斌 郭杰 杨斌 |
| |
| 作者单位： | 上海交通大学微纳科学技术研究院,微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海200240 |
| |
| 基金项目： | 国家自然科学基金资助项目，上海市科委重点资助项目，无锡研究院交大专项资金资助项目 |
| |
| 摘 要： | 设计了一种适用于深低温环境的微型加热器。使用AC磁控溅射技术将NiCr(80/20 at.%)合金沉积到SiO2/Si基底上,并采用微加工工艺实现薄膜图形化,作为加热器的加热元件。研究了NiCr薄膜的电学性能和晶体结构与退火条件之间的关系。实验表明:在450℃氮气环境下退火30min,可以获得深低温性能优良的NiCr加热器。该加热器在20K时的电阻温度系数(TCR)为80.80×10-6/K。X射线衍射(XRD)分析显示NiCr薄膜在450℃氮气环境下退火后,薄膜的结晶度增大,因此,退火条件对薄膜的电阻率和电阻温度系数有较大的影响。
|
| 关 键 词： | 微型加热器 MEMS 镍铬合金 深低温 退火处理 |
Research on electrical properties of NiCr thin film micro-heater in cryogenic environment |
| |
| WU Ting-ting,LIU Jing-quan,JIANG Shui-dong,XU Bin,GUO Jie,YANG Bin.Research on electrical properties of NiCr thin film micro-heater in cryogenic environment[J].Transducer and Microsystem Technology,2014,33(9):38-41. |
| |
| Authors: | WU Ting-ting LIU Jing-quan JIANG Shui-dong XU Bin GUO Jie YANG Bin |
| |
| Affiliation: | (National Key Laboratory of Science and Technology on Miero/Nano Fabrication,Key Laboratory for Thin Film and Mierofabrieation of Ministry of Education, Institute of Miero/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China) |
| |
| Abstract: | A micro-heater used in cryogenic environment is designed. NiCr （80/20 at. % ） thin film is deposited on SiO2/Si substrates by AC magnetron sputtering technique and patterned by micro processing technology as heating component. The electrical properties and crystalstructure of NiCr film is researched. Experiment shows that good performance NiCr heater can be obtained after annealed at 450 ℃ for 30 min in N2. The temperature coefficient of resistance （TCR） of heater is 80.80 ×10-6/K at 20 K. X-ray diffraction （XRD） analysis show crystallinity of the thin film becomes stronger after annealed at 450 ℃ in N2 ambient, so annealing conditions have a significant effect on resistivity and TCR of thin film. |
| |
| Keywords: | micro-heater MEMS NiCr alloy cryogenic annealing treatment |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
