PEO基聚合物固体电解质的键合性能

为了促进微机电系统封装技术的发展, 设计了应用聚氧化乙烯 (polyethylene oxide, PEO) 作为主体材料, 通过掺杂不同的锂盐获得聚合物固体电解质用于阳极键合进行封装.阳极键合对材料的要求主要是具有离子导电性, 因此采用X射线小角衍射 (small-angle X-ray scattering, SAXS) 和傅里叶红外光谱 (Fouriex transform infrared radiation spectroscopy, FTIR) 对设计的高分子固体电解质的导电机理进行分析.研究结果表明:LiClO₄的离解能更小;锂离子的迁移数更多;随着其质量分数的增加, 电导率更高;通过键合结果发现, PEO-LiClO₄和金属铝键合界面过渡层的产生是两者得以焊合的关键.

Bonding Properties of Solid Polymer Electrolyte Based on PEO

To promote the development of micro-electro-mechanical system packaging technology,design the application of polyethylene oxide( PEO) as the main material,different lithium were doped into PEO to obtain polymer solid electrolyte material for anodic bonding package. Anodic bonding requirements of the material are mainly with ionic conductivity; therefore,small-angle X-ray scattering( SAXS) and Fourier transform infrared radiation spectroscopy( FTIR) are used to analyze conductive mechanism of polymer solid electrolyte material. Results show that: dissociation energy of Li Cl O4 is small; the transport number of lithium ions is more; with the increase of the content,the electrical conductivity increases.Bonding shows that PEO-Li Cl O4 and aluminum bonding interface between the transition layers is the key to bond together.