氧化锌薄膜的光学相干层析检测方法研究

为了实现对氧化锌薄膜的厚度测量,采用光学相干层析成像的方法进行了理论分析和实验验证,获得了含厚度信息的1维深度图像和含内部结构信息的2维层析图像。结果表明,该方法测得的薄膜厚度值与理论值一致。该研究说明谱域光学相干层析成像技术的测量结果真实有效,可以用于薄膜的厚度测量和质量检测。

Study on optical coherence tomography detection of ZnO film

In order to measure the thickness of ZnO film, optical coherence tomography (OCT) technique was used for theoretic analysis and experimental verification. The 1-D depth image including thickness information and the 2-D cross-sectional image including structure information were obtained simultaneously. The results show that the measuring result is almost as same as the theoretical value. It is illustrated that the measurement of the spectral-domain OCT is real and effective. It can be used for the measurement of thickness and quality of the film.