氩气流量对丙纶基氧化锌/铜复合膜结构及抗紫外线性能的影响

在室温条件下先用直流溅射的方式在丙纶非织造布表面沉积铜膜,再用射频磁控溅射法在铜膜表面沉积氧化锌薄膜形成层状膜,借助X射线能谱仪（EDX）、扫描电子显微镜（SEM）、原子力显微镜（AFM）和X射线衍射（XRD）观察薄膜结构,通过改变氩气流量研究其对织物紫外线透过率的影响.实验结果表明,随着氩气流量的增加,纳米薄膜颗粒先增大后缩小,紫外线透过率也先升高后降低,在氩气流量为40 mL/min时,紫外线透过率最低.

Effects of argon gas flow rate on the structure and ultraviolet resistance properties of ZnO /Cu composite films

The Cu films were deposited on the surface of PP nonwoven by DC sputtering at room temperature. ZnO thin films were deposited the surface of the copper films by RF magnetron sputtering to form layered films. With X-ray energy dispersive spectroscopy（ EDX）,scanning electron microscopy（ SEM）,atomic force microscopy（ AFM）,X-ray diffraction（ XRD） observed the structure of films. The influence on UV transmittance of the fabric was studied by changing the flow rate of argon gas. Results of experiments show that with the increase of argon gas flow,nano particles of film first increase and then decrease. UV transmittance is increased and then decreased. The UV transmittance is of minimum in an argon gas flow of 40 sccm.