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大型非球面能动磨盘精磨技术
引用本文:范斌,曾志革,李晓今,伍凡. 大型非球面能动磨盘精磨技术[J]. 红外与激光工程, 2007, 36(6): 873-876
作者姓名:范斌  曾志革  李晓今  伍凡
作者单位:中国科学院光电技术研究所,四川,成都,610209;中国科学院光电技术研究所,四川,成都,610209;中国科学院光电技术研究所,四川,成都,610209;中国科学院光电技术研究所,四川,成都,610209
基金项目:国家重点基础研究发展计划(973计划)
摘    要:计算机控制能动磨盘加工技术是集传统加工技术、能动技术和数控技术为一体的大型非球面光学元件先进制造技术。基于Preston方程,通过对能动磨盘结构的研究,建立了工件的能动磨盘磨削函数;分析了能动磨盘分别位于工件中心孔和外缘处产生的边缘效应,并建立相应的边缘效应函数;由此得到用于描述能动磨盘加工的数学模型。在该模型的指导下完成了Φ1 200 mm(F/1.5)非球面主镜能动磨盘精磨加工,实现了主镜面形误差的均方根值从4.5 μm(峰谷值26.8 μm)收敛到0.36 μm(峰谷值2.8 μm)。

关 键 词:光学加工  计算机控制能动磨盘  非球面
文章编号:1007-2276(2007)06-0873-04
收稿时间:2007-02-13
修稿时间:2007-03-19

Fine grinding technology of active lap for large aspherics
FAN Bin,ZENG Zhi-ge,LI Xiao-jin,WU Fan. Fine grinding technology of active lap for large aspherics[J]. Infrared and Laser Engineering, 2007, 36(6): 873-876
Authors:FAN Bin  ZENG Zhi-ge  LI Xiao-jin  WU Fan
Affiliation:Institute of Optics and Electronics, Chinese Academy of Science, Chengdu 610209, China
Abstract:Computer Control Active Lap(CCAL) processing is an advanced optical manufacture technology for large aspheric optical elements, which combines classical manufacture technology with active technology and numerical control technology. Based on Preston Equation and the investigation of active lap structure, the workpiece removal function with active lap is founded. By analyzing the edge effects when the lap approaches to both the center hole and the outer edge of workpiece,its edge effect functions are also founded. And the mathematical model is set up to describe active lap manufacture. Under the direction of the model, a Φ1 200 mm(F/1.5)aspheric primary mirror has been grinded with active laps. The root-mean-square and the peak-to-valley values of its surface figure error converge from 4.5 μm to 0.36 μm and from 26.8 μm to 2.8 μm respectively.
Keywords:Optic manufacture   CCAL   Aspheric
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