Fabrication and structural characterization of (Ba,Sr)TiO3 thin films produced by Electrostatic Spray Assisted Vapour Deposition |
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| Affiliation: | School of Mechanical, Materials and Manufacturing Engineering, University of Nottingham, University Park Campus, Nottingham NG7 2RD, UK;Department of Chemical Sciences, University of Catania, Viale A.Doria 6, 95125 Catania, Italy;University of Lund, Solid State Physics, Box 118, S-221 00 Lund, Sweden;Institut fuer Angewandte Physik, Halbleiterphysik, TU Dresden, D-01062 Dresden, Germany;Department of Chemistry & CSGI, room 295, University of Florence, via della Lastruccia 3, Sesto Fiorentino, 50019 Florence, Italy |
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| Abstract: | Thin films of perovskite (Ba,Sr)TiO3 (BST) system are promising candidates for microelectronic devices that can be integrated into semiconductor technology. The lead-free solid solution BaxSr1−xTiO3 is a high permittivity dielectric material with low loss and suitable for use in dynamic random access memory cells, tunable microwave devices, by-pass capacitors and infrared detectors. A versatile and cost-effective Electrostatic Spray Assisted Vapour Deposition (ESAVD) process has been used to fabricate nanostructured BST film. The crystal structure, surface morphology and homogeneity of composition of BST thin films have been investigated using a combination of XRD, SEM, AFM, Raman spectroscopy and XPS techniques. |
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