| 纳米样板的制备及其精度分析 |
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| 引用本文： | 景蔚萱,赵惠英,蒋庄德.纳米样板的制备及其精度分析[J].计量学报,2004,25(1):6-10,42. |
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| 作者姓名： | 景蔚萱 赵惠英 蒋庄德 |
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| 作者单位： | 西安交通大学精密工程研究所,陕西,西安,710049 |
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| 基金项目： | 高等学校骨干教师资助计划项目，国家教育部博士点基金项目(1999069821) |
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| 摘 要： | 介绍了纳米样板的研究现状及制备工艺，特别对扫描探针显微镜(SPM)表面局域氧化反应工艺进行了详述；分析了原子力显微镜(AFM)探针诱导局域氧化工艺的原理及其影响参数，原理为高度局域化的电化学反应，影响参数包括探针上所施加的电压、扫描速度、探针曲率半径、相对湿度以及氧化物厚度等；用该方法分别制备了5条栅线和7条栅线的一维纳米结构样板，并对7条栅线的纳米结构样板的精度和不确定度影响因素进行了分析。
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| 关 键 词： | 计量学 原子力显微镜 纳米样板 探针诱导阳极氧化 线宽 直线度 平行度 不确定度 |
| 文章编号： | 1000-1158(2004)01-0006-06 |
Fabrication and Precision Analysis of Nano-scale Sample-plate |
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| JING Wei-xuan,ZHAO Hui-ying,JIANG Zhuang-de.Fabrication and Precision Analysis of Nano-scale Sample-plate[J].Acta Metrologica Sinica,2004,25(1):6-10,42. |
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| Authors: | JING Wei-xuan ZHAO Hui-ying JIANG Zhuang-de |
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| Abstract: | The research situation and fabrication techniques of nano-scale sample-plate are introduced, and the local surface oxidation with SPM is discussed in detail. The principle and parameters of tip-induced local surface oxidation with AFM are presented. 1D nano-scale sample-plates with 5 and 7 grating lines are fabricated with this technique, respectively. The fabrication precision of the 1D nano-scale sample-plate with 7 grating lines, such as critical dimensions, linearity as well as parallelism of the grating lines are analyzed. Besides, the influencing factors of uncertainty of nano-scale sample-plates are investigated also. |
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| Keywords: | Metrology Atomic force microscope (AFM) Nano-scale sample-plate Tip-induced anodization oxidation Critical dimension Linearity Parallelism Uncertainty |
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