Initial and PBTI-induced traps and charges in Hf-based oxides/TiN stacks

Positive voltage instabilities are studied for Nmos transistors with hafnium-based high-κ gate stacks. Using an optimized dedicated fast measurement setup, dynamic transient measurements of drain current are performed over more than ten decades of time. The two main phenomena involved, a reversible one known as hysteresis and a nonreversible one known as PBTI are clearly experimentally separated and studied in detail. A physical model is presented, explaining the dynamic behaviour and leading to precise traps physical characteristics and profiles inside the HfO₂ layer. PBTI defects in HfO₂ are shown to be of a different nature than hysteresis traps. A turn-around effect is evidenced for PBTI above which physical mechanisms seem to change; it has important implications on lifetime determination methodology. Finally, HfSiON experiments are presented for both hysteresis and PBTI and they show that this material is much less critical than HfO₂.